The effect of UV radiation on negative photoresist named _________. 

Surface acoustic wave transducers can be used to separate particles.

In basic principle of capacitive MEMS accelerometer, one of the ways to maximize accelerometer sensitivity is increasing the proof mass size.  

One of the reasons that the (111) planes are normally etched slower than (100) planes is because (100) plane has more dangling bonds for atom at Si surface.

Misalignment of a rectangular shaped mask opening relative to the direction of major flat of a (100) silicon wafer that results in a larger etched region.

Convex corners become undercut, as there is no single slow-etching (111) plane to stop on. That means convex corners will stop the anisotropic etching process.

One of the functions of the packaging is that the package acts as an interface between the MEMS and the system

Advanced packaging also provides mechanical protection, environment control (hermetic encapsulation), and management of excessive thermal energy generated (thermal management). 

Which one of the below is called “light field” or “clear field” mask? 

One of the MEMS devices that can be used to characterize surface topology of thin films is atomic force microscopy (AFM), where the cantilever beam deflects because of Van der Waals force between the cantilever beam tip and the sample.