__________ are devices that can measure a parameter of interest, typically non-electrical, and generate an electrical signal that can be processed by computers.

One of the MEMS devices that can be used to characterize surface topology of thin films is atomic force microscopy (AFM), where the cantilever beam deflects because of Van der Waals force between the cantilever beam tip and the sample.

One of the pressure sensor types is the differential pressure sensor where the technique depends on measuring the difference between two pressure points.

Capacitive MEMS microphones are robust to dust, water and particulate matter.  

Capacitive MEMS microphones are robust to dust, water and particulate matter.  

According to MEMS market forecast RF MEMS industry will keep shrinking.

The figure below shows (101) plane.

The angle between the planes {100} and {111} is 54.7°.

Circle the diagram that shows the plane (221) correctly drawn.

Problem #1: Short Answer and Single Choice Questions for Concepts (25 Pts)